ISO 14644-1 Cleanroom Standards
| Class | maximum particles/m³ | FED STD 209E equivalent |
|||||
|---|---|---|---|---|---|---|---|
| ≥0.1 µm | ≥0.2 µm | ≥0.3 µm | ≥0.5 µm | ≥1 µm | ≥5 µm | ||
| ISO 1 | 10 | 2.37 | 1.02 | 0.35 | 0.083 | 0.0029 | |
| ISO 2 | 100 | 23.7 | 10.2 | 3.5 | 0.83 | 0.029 | |
| ISO 3 | 1,000 | 237 | 102 | 35 | 8.3 | 0.29 | Class 1 |
| ISO 4 | 10,000 | 2,370 | 1,020 | 352 | 83 | 2.9 | Class 10 |
| ISO 5 | 100,000 | 23,700 | 10,200 | 3,520 | 832 | 29 | Class 100 |
| ISO 6 | 1.0×106 | 237,000 | 102,000 | 35,200 | 8,320 | 293 | Class 1,000 |
| ISO 7 | 1.0×107 | 2.37×106 | 1,020,000 | 352,000 | 83,200 | 2,930 | Class 10,000 |
| ISO 8 | 1.0×108 | 2.37×107 | 1.02×107 | 3,520,000 | 832,000 | 29,300 | Class 100,000 |
| ISO 9 | 1.0×109 | 2.37×108 | 1.02×108 | 35,200,000 | 8,320,000 | 293,000 | Room air |
Read more about this topic: Cleanroom, Cleanroom Classifications
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