Chemical Beam Epitaxy - Growth Kinetics

Growth Kinetics

In order to better understand the growth kinetics associated with CBE, it is important to look at physical and chemical processes associated with MBE and MOCVD as well. Figure 2 depicts those. The growth kinetics for these three techniques differ in many ways. In conventional gas source MBE, the growth rate is determined by the arrival rate of the group III atomic beams. The epitaxial growth takes place as the group III atoms impinge on the heated substrate surface, migrates into the appropriate lattice sites and then deposits near excess group V dimers or tetramers. It is worth noting that no chemical reaction is involved at the surface since the atoms are generated by thermal evaporation from solid elemental sources.

In MOCVD, group III alkyls are already partially dissociated in the gas stream. These diffuse through a stagnant boundary layer that exists over the heated substrate, after which they dissociate into the atomic group III elements. These atoms then migrate to the appropriate lattice site and deposit epitaxially by associating with a group V atom that was derived from the thermal decomposition of the hydrides. The growth rate here is usually limited by the diffusion rate of the group III alkyls through the boundary layer. Gas phase reactions between the reactants have also been observed in this process.

In CBE processes, the hydrides are cracked in a high temperature injector before they reach the substrate. The temperatures are typically 100-150°C lower than they are in a similar MOCVD or MOVPE. There is also no boundary layer (such as the one in MOCVD) and molecular collisions are minimal due to the low pressure. The group V alkyls are usually supplied in excess, and the group III alkyl molecules impinge directly onto the heated substrate as in conventional MBE. The group III alkyl molecule has two options when this happens. The first option is to dissociate its three alkyl radicals by acquiring thermal energy from the surface, and leaving behind the elemental group III atoms on the surface. The second option is to re-evaporate partially or completely undissociated. Thus, the growth rate is determined by the arrival rate of the group III alkyls at a higher substrate temperature, and by the surface pyrolysis rate at lower temperatures.