Alpha 21264 - Fabrication

Fabrication

The Alpha 21264 contained 15.2 million transistors. The logic consisted of approximately six million transistors, with the rest contained in the caches and branch history tables. The die measured 16.7 mm by 18.8 mm (313.96 mm²). It was fabricated in a 0.35 µm complementary metal–oxide–semiconductor (CMOS) process with six levels of interconnect.

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